Design and Development of single chip Gas Sensor system for environmental pollution monitoring
The talk describes about the design and fabrication of a four element gas sensor array for monitoring air pollutants, namely CO, CO?, NO?, and SO?. The four micro-heaters share a single suspended SiO?
diaphragm, utilizing thermal proximity to achieve low power consumption (~10 mW for 300 °C). Plasma enhanced chemical vapour deposition SiO? diaphragm is demonstrated to give higher yield compared
with thermally grown SiO?. Sensor array elements are fabricated by customizing each element to sense a specific gas, using different sensing materials. Optimized thin films of ZnO, BaTiO?-CuO doped with
1% Ag, WO?, and V?O? are used for selective sensing of CO, CO?, NO?, and SO?. Four sensors can be independently controlled to operate at different temperatures to get high selectivity for test gases.
The sensor array is packaged and then characterized for gas sensing. It is demonstrated that the sensors exhibit good sensitivity and selectivity.
Speaker
Dr Rudraswamy S B
Role: Associate Professor
Organisation: Sri Jayachamarajendra College of Engineering, Mysuru, India
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E5, James Light Hill Building, Sackville Street
